Photonic MEMS tunable laser sources

doi:10.1016/S1005-8885(08)60217-4

中国邮电高校学报(英文) ›› 2009, Vol. 16 ›› Issue (3): 1-3.doi: 10.1016/S1005-8885(08)60217-4

• Invited Paper • 下一篇

Photonic MEMS tunable laser sources

刘爱群

School of Electrical and Electronic Engineering, Nanyang Technological University, 50 Nanyang Avenue 639798, Singapore

收稿日期:1900-01-01 修回日期:1900-01-01 出版日期:2009-06-30
通讯作者: 刘爱群

Photonic MEMS tunable laser sources

LIU Ai-qun

School of Electrical and Electronic Engineering, Nanyang Technological University, 50 Nanyang Avenue 639798, Singapore

Received:1900-01-01 Revised:1900-01-01 Online:2009-06-30
Contact: LIU Ai-qun

摘要/Abstract

摘要：

This article covers laser configurations, design and experiments of photonic microelectromechanical systems (MEMS) tunable laser sources. Three different types of MEMS tunable lasers such as MEMS coupled-cavity lasers, injection-locked laser systems and dual-wavelength tunable lasers are demonstrated as examples of natural synergy of MEMS with photonics. The expansion and penetration of the MEMS technology to silicon optoelectronic creates on-chip optical systems at an unprecedented scale of integration. While producing better integration with robustness and compactness, MEMS improves the functionalities and specifications of laser chips. Additionally, MEMS tunable lasers are featured with small size, high tuning speed, wide tuning range and CMOS compatible integration, which broaden their applications to many fields.

关键词:

photonic;MEMS,;tunable;laser,;photonics,;silicon;optoelectronics

Abstract:

Key words:

photonic MEMS;tunable laser;photonics;silicon optoelectronics

LIU Ai-qun. Photonic MEMS tunable laser sources[J]. Acta Metallurgica Sinica(English letters), 2009, 16(3): 1-3.

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Photonic MEMS tunable laser sources

Photonic MEMS tunable laser sources

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