Preparation of a new gate dielectric material HfTiON film
YU Guo-yi, ZOU Xue-cheng, CHEN Wei-bing
Preparation of a new gate dielectric material HfTiON film
YU Guo-yi, ZOU Xue-cheng, CHEN Wei-bing
Acta Metallurgica Sinica(English letters)
.
2007, (1): 77
-79
.
DOI: 1005-8885 (2007) 01-0077-03
